Thermal Property Measurement System : Temperature-Programmed Desorption Gas Analyzer TDS-M202R
Reach a target temperature for a short time, Mass analysis of up to 200amu is available
This system can measure the gas desorbed from a sample with a quadro-pole mass filter after heating up to a target temperature.
Applications
• Evaluation of various vacuum materials like vacuum grease and O-rings
• Evaluation of semiconductor wafers and chips
• Analysis of small amount of gas desorbed from alloy and ceramics etc.
Features
• Capable of mass analysis measurement in a high vacuum of 10-5Pa range
• A wide range of heating setting from high speed to low speed, multistep heating and cyclic heating are available
• With a quartz reaction tube employing cold wall method, there is almost no gas emitted by infrared lamp heating.
• Easy data collection by using PC’s RS-232C (option)
Specifications
|
Temperature range |
RT ～ 1000 °C |
|
Sample size |
□ 20 × t 2 (mm) |
|
Atmosphere |
Vacuum |
|
Heating method |
Paraboloidal reflected infrared tubular heating method |
|
Temperature sensor |
Thermocouple (JIS “K”) |
|
Ultimate vacuum |
The range of 10-5 Pa (after 8-hour baking) |
|
Measurement range of mass amount |
1 ～ 200 amu |
|
Safe guard |
Cooling water • Earth leakage(ELB) |
|
Sensitivity |
4A/Pa |
|
Resolution |
M/ Δ M=1M (10% P.H.) |